Micromachined inertial sensors N Yazdi, F Ayazi, K Najafi
Proceedings of the IEEE 86 (8), 1640-1659, 1998
2736 1998 A HARPSS polysilicon vibrating ring gyroscope F Ayazi, K Najafi
Journal of microelectromechanical systems 10 (2), 169-179, 2001
515 2001 An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations Z Hao, A Erbil, F Ayazi
Sensors and Actuators A: Physical 109 (1-2), 156-164, 2003
503 2003 Process and temperature compensation in a 7-MHz CMOS clock oscillator K Sundaresan, PE Allen, F Ayazi
IEEE Journal of solid-state circuits 41 (2), 433-442, 2006
307 2006 Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications R Abdolvand, HM Lavasani, GK Ho, F Ayazi
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 55 …, 2008
246 2008 High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps S Pourkamali, A Hashimura, R Abdolvand, GK Ho, A Erbil, F Ayazi
Journal of Microelectromechanical Systems 12 (4), 487-496, 2003
244 2003 High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology F Ayazi, K Najafi
Journal of Microelectromechanical Systems 9 (3), 288-294, 2000
240 2000 A 2.5-V 14-bit/spl Sigma//spl Delta/CMOS SOI capacitive accelerometer BV Amini, F Ayazi
IEEE Journal of Solid-State Circuits 39 (12), 2467-2476, 2004
226 2004 Effect of phonon interactions on limiting the fQ product of micromechanical resonators R Tabrizian, M Rais-Zadeh, F Ayazi
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
224 2009 Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators GK Ho, R Abdolvand, A Sivapurapu, S Humad, F Ayazi
Journal of microelectromechanical systems 17 (2), 512-520, 2008
221 2008 A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour Allan deviation bias instability MF Zaman, A Sharma, Z Hao, F Ayazi
Journal of Microelectromechanical systems 17 (6), 1526-1536, 2008
196 2008 An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon R Abdolvand, F Ayazi
Sensors and Actuators A: Physical 144 (1), 109-116, 2008
178 2008 A Sub-0.2 A Sharma, MF Zaman, F Ayazi
IEEE Journal of Solid-State Circuits 44 (5), 1593-1608, 2009
172 2009 A 4.5-mW Closed-Loop BV Amini, R Abdolvand, F Ayazi
IEEE Journal of Solid-State Circuits 41 (12), 2983-2991, 2006
169 2006 Piezoelectric on semiconductor-on-insulator microelectromechanical resonators F Ayazi, G Piazza, R Abdolvand, GK Ho, S Humad
US Patent 6,909,221, 2005
165 2005 VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part II: implementation and characterization S Pourkamali, Z Hao, F Ayazi
Journal of Microelectromechanical Systems 13 (6), 1054-1062, 2004
162 2004 Design and fabrication of high-performance polysilicon vibrating ring gyroscope F Ayazi, K Najafi
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro …, 1998
156 1998 Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass R Abdolvand, BV Amini, F Ayazi
Journal of microelectromechanical systems 16 (5), 1036-1043, 2007
155 2007 A 104-dB dynamic range transimpedance-based CMOS ASIC for tuning fork microgyroscopes A Sharma, MF Zaman, F Ayazi
IEEE Journal of Solid-State Circuits 42 (8), 1790-1802, 2007
151 2007 Electronically temperature compensated silicon bulk acoustic resonator reference oscillators K Sundaresan, GK Ho, S Pourkamali, F Ayazi
IEEE Journal of Solid-State Circuits 42 (6), 1425-1434, 2007
148 2007 