| Low-loss, extreme subdiffraction photon confinement via silicon carbide localized surface phonon polariton resonators JD Caldwell, OJ Glembocki, Y Francescato, N Sharac, V Giannini, ... Nano letters 13 (8), 3690-3697, 2013 | 334 | 2013 |
| Plasmonic nanopillar arrays for large-area, high-enhancement surface-enhanced Raman scattering sensors JD Caldwell, O Glembocki, FJ Bezares, ND Bassim, RW Rendell, ... ACS nano 5 (5), 4046-4055, 2011 | 245 | 2011 |
| Spectral tuning of localized surface phonon polariton resonators for low-loss mid-IR applications Y Chen, Y Francescato, JD Caldwell, V Giannini, TWW Maß, ... Acs Photonics 1 (8), 718-724, 2014 | 158 | 2014 |
| Mie resonance-enhanced light absorption in periodic silicon nanopillar arrays FJ Bezares, JP Long, OJ Glembocki, J Guo, RW Rendell, R Kasica, ... Optics Express 21 (23), 27587-27601, 2013 | 146 | 2013 |
| Directed Self-Assembly of Epitaxial CoFe2O4–BiFeO3 Multiferroic Nanocomposites R Comes, H Liu, M Khokhlov, R Kasica, J Lu, SA Wolf Nano letters 12 (5), 2367-2373, 2012 | 145 | 2012 |
| Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars JD Caldwell, OJ Glembocki, FJ Bezares, MI Kariniemi, JT Niinistö, ... Optics express 19 (27), 26056-26064, 2011 | 79 | 2011 |
| The nanolithography toolbox KC Balram, DA Westly, M Davanco, KE Grutter, Q Li, T Michels, CH Ray, ... Journal of Research of the National Institute of Standards and Technology …, 2016 | 70 | 2016 |
| Nanoscale imaging and spectroscopy of plasmonic modes with the PTIR technique AM Katzenmeyer, J Chae, R Kasica, G Holland, B Lahiri, A Centrone Adv. Opt. Mater 2 (8), 718-722, 2014 | 62 | 2014 |
| Initial lithography results from the digital electrostatic e-beam array lithography concept LR Baylor, WL Gardner, X Yang, RJ Kasica, MA Guillorn, B Blalock, H Cui, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004 | 38 | 2004 |
| Aspect-ratio driven evolution of high-order resonant modes and near-field distributions in localized surface phonon polariton nanostructures CT Ellis, JG Tischler, OJ Glembocki, FJ Bezares, AJ Giles, R Kasica, ... Scientific reports 6 (1), 32959, 2016 | 37 | 2016 |
| Nanoparticle size determination using optical microscopes R Attota, PP Kavuri, H Kang, R Kasica, L Chen Applied Physics Letters 105 (16), 2014 | 35 | 2014 |
| The role of propagating and localized surface plasmons for SERS enhancement in periodic nanostructures FJ Bezares, JD Caldwell, O Glembocki, RW Rendell, M Feygelson, ... Plasmonics 7, 143-150, 2012 | 34 | 2012 |
| SCALPEL proof-of-concept system: Preliminary lithography results WK Waskiewicz, CJ Biddick, MI Blakey, KJ Brady, RM Camarda, ... Emerging Lithographic Technologies 3048, 255-263, 1997 | 27 | 1997 |
| Cryogenic etching of high aspect ratio 400-nm pitch silicon gratings H Miao, L Chen, M Mirzaeimoghri, R Kasica, H Wen Journal of Microelectromechanical Systems 25 (5), 963-967, 2016 | 18 | 2016 |
| Novel organosilicate polymer resists for high resolution e-beam lithography JH Sim, SI Lee, HJ Lee, R Kasica, HM Kim, CL Soles, KB Kim, DY Yoon Chemistry of Materials 22 (10), 3021-3023, 2010 | 17 | 2010 |
| Monte Carlo study of high performance resists for SCALPEL nanolithography LE Ocola, WY Li, RJ Kasica, MI Blakey, PA Orphanos, WK Waskiewicz, ... Microelectronic engineering 53 (1-4), 433-436, 2000 | 17 | 2000 |
| Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system JA Liddle, MI Blakey, K Bolan, RC Farrow, GM Gallatin, R Kasica, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001 | 15 | 2001 |
| 200-mm SCALPEL mask development GR Bogart, AE Novembre, A Kornblit, ML Peabody Jr, RC Farrow, ... Emerging Lithographic Technologies III 3676, 171-177, 1999 | 14 | 1999 |
| Through-focus scanning and scatterfield optical methods for advanced overlay target analysis R Attota, M Stocker, R Silver, A Heckert, H Zhou, R Kasica, L Chen, ... Metrology, Inspection, and Process Control for Microlithography XXIII 7272 …, 2009 | 13 | 2009 |
| Polymer-assisted conformal coating of TiO2 thin films ES Gillman, D Costello, M Moreno, A Raspopin, R Kasica, L Chen Journal of Applied Physics 108 (4), 2010 | 10 | 2010 |
