Performance evaluation of control networks: Ethernet, ControlNet, and DeviceNet FL Lian, JR Moyne, DM Tilbury IEEE control systems magazine 21 (1), 66-83, 2001 | 955 | 2001 |
Network design consideration for distributed control systems FL Lian, J Moyne, D Tilbury IEEE transactions on control systems technology 10 (2), 297-307, 2002 | 810 | 2002 |
Using deadbands to reduce communication in networked control systems PG Otanez, JR Moyne, DM Tilbury Proceedings of the 2002 American Control Conference (IEEE Cat. No. CH37301 …, 2002 | 448 | 2002 |
The emergence of industrial control networks for manufacturing control, diagnostics, and safety data JR Moyne, DM Tilbury Proceedings of the IEEE 95 (1), 29-47, 2007 | 434 | 2007 |
Run-to-run control in semiconductor manufacturing J Moyne Encyclopedia of Systems and Control, 1997-2003, 2021 | 373 | 2021 |
Big data analytics for smart manufacturing: Case studies in semiconductor manufacturing J Moyne, J Iskandar Processes 5 (3), 39, 2017 | 291 | 2017 |
A requirements driven digital twin framework: Specification and opportunities J Moyne, Y Qamsane, EC Balta, I Kovalenko, J Faris, K Barton, DM Tilbury Ieee Access 8, 107781-107801, 2020 | 219 | 2020 |
Run by run control of chemical-mechanical polishing DS Boning, WP Moyne, TH Smith, J Moyne, R Telfeyan, A Hurwitz, ... IEEE Transactions on Components, Packaging, and Manufacturing Technology …, 1996 | 219 | 1996 |
Modelling and optimal controller design of networked control systems with multiple delays FL Lian, J Moyne, D Tilbury International Journal of Control 76 (6), 591-606, 2003 | 197 | 2003 |
Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares AA Khan, JR Moyne, DM Tilbury Journal of Process Control 18 (10), 961-974, 2008 | 179 | 2008 |
Analysis and modeling of networked control systems: MIMO case with multiple time delays FL Lian, J Moyne, D Tilbury Proceedings of the 2001 American Control Conference.(Cat. No. 01CH37148) 6 …, 2001 | 178 | 2001 |
An approach for factory-wide control utilizing virtual metrology AA Khan, JR Moyne, DM Tilbury IEEE Transactions on semiconductor Manufacturing 20 (4), 364-375, 2007 | 177 | 2007 |
A unified digital twin framework for real-time monitoring and evaluation of smart manufacturing systems Y Qamsane, CY Chen, EC Balta, BC Kao, S Mohan, J Moyne, D Tilbury, ... 2019 IEEE 15th international conference on automation science and …, 2019 | 130 | 2019 |
Optimal controller design and evaluation for a class of networked control systems with distributed constant delays FL Lian, J Moyne, D Tilbury Proceedings of the 2002 American Control Conference (IEEE Cat. No. CH37301 …, 2002 | 109 | 2002 |
Control of semiconductor manufacturing equipment: Real-time feedback control of a reactive ion etcher BA Rashap, ME Elta, H Etemad, JP Fournier, JS Freudenberg, MD Giles, ... IEEE Transactions on Semiconductor Manufacturing 8 (3), 286-297, 1995 | 105 | 1995 |
Generic cell controlling method and apparatus for computer integrated manufacturing system JR Moyne US Patent 5,469,361, 1995 | 103 | 1995 |
Network architecture and communication modules for guaranteeing acceptable control and communication performance for networked multi-agent systems FL Lian, JK Yook, DM Tilbury, J Moyne IEEE Transactions on Industrial Informatics 2 (1), 12-24, 2006 | 100 | 2006 |
Big data capabilities applied to semiconductor manufacturing advanced process control J Moyne, J Samantaray, M Armacost IEEE transactions on semiconductor manufacturing 29 (4), 283-291, 2016 | 96 | 2016 |
Towards automated safety vetting of plc code in real-world plants M Zhang, CY Chen, BC Kao, Y Qamsane, Y Shao, Y Lin, E Shi, S Mohan, ... 2019 IEEE Symposium on Security and Privacy (SP), 522-538, 2019 | 80 | 2019 |
A methodology to develop and implement digital twin solutions for manufacturing systems Y Qamsane, J Moyne, M Toothman, I Kovalenko, EC Balta, J Faris, ... IEEE Access 9, 44247-44265, 2021 | 79 | 2021 |