| Cryogenic etching of porous low-k dielectrics in CF3Br and CF4 plasmas A Rezvanov, AV Miakonkikh, AS Vishnevskiy, KV Rudenko, MR Baklanov Journal of Vacuum Science & Technology B 35 (2), 2017 | 30 | 2017 |
| Tight-binding terahertz plasmons in chemical-vapor-deposited graphene A Bylinkin, E Titova, V Mikheev, E Zhukova, S Zhukov, M Belyanchikov, ... Physical Review Applied 11 (5), 054017, 2019 | 29 | 2019 |
| Anisotropy of hydrogen plasma effects in bulk n-type β-Ga2O3 AY Polyakov, IH Lee, A Miakonkikh, AV Chernykh, NB Smirnov, ... Journal of Applied Physics 127 (17), 2020 | 28 | 2020 |
| Модели рейтингов финансовой устойчивости АМ Карминский, АУ Мяконьких, АА Пересецкий Управление финансовыми рисками, 2-18, 2008 | 25 | 2008 |
| Ferroelectric properties of SOS and SOI pseudo-MOSFETs with HfO2 interlayers VP Popov, VA Antonov, MA Ilnitsky, IE Tyschenko, VI Vdovin, ... Solid-State Electronics 159, 63-70, 2019 | 20 | 2019 |
| Local sensor based on nanowire field effect transistor from inhomogeneously doped silicon on insulator DE Presnov, IV Bozhev, AV Miakonkikh, SG Simakin, AS Trifonov, ... Journal of Applied Physics 123 (5), 2018 | 19 | 2018 |
| Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer VP Popov, MA Ilnitskii, ED Zhanaev, AV Myakon’Kich, KV Rudenko, ... Semiconductors 50, 632-638, 2016 | 19 | 2016 |
| Micro-Raman spectroscopy for monitoring of deposition quality of high-k stack protective layer onto nanowire FET chips for highly sensitive miRNA detection KA Malsagova, TO Pleshakova, AF Kozlov, ID Shumov, MA Ilnitskii, ... Biosensors 8 (3), 72, 2018 | 18 | 2018 |
| Size effects in LiNbO3 thin films fabricated by pulsed laser deposition Z Vakulov, M Ivonin, EG Zamburg, VS Klimin, DP Volik, DA Golosov, ... Journal of Physics: Conference Series 1124 (2), 022032, 2018 | 17 | 2018 |
| Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition YM Chesnokov, AV Miakonkikh, AE Rogozhin, KV Rudenko, AL Vasiliev Journal of materials science 53, 7214-7223, 2018 | 17 | 2018 |
| Plasma etching of poly-Si/SiO2/Si structures: Langmuir-probe and optical-emission-spectroscopy monitoring KV Rudenko, AV Myakon’kikh, AA Orlikovsky Russian Microelectronics 36, 179-192, 2007 | 17 | 2007 |
| Effect of terminal methyl group concentration on critical properties and plasma resistance of organosilicate low-k dielectrics AA Rezvanov, AV Miakonkikh, DS Seregin, AS Vishnevskiy, KA Vorotilov, ... Journal of Vacuum Science & Technology A 38 (3), 2020 | 16 | 2020 |
| New method for the Langmuir probe diagnostics of polymerizing plasmas KV Rudenko, AV Myakon’kikh, AA Orlikovsky, AN Pustovit Russian Microelectronics 36, 14-26, 2007 | 16 | 2007 |
| Influence of target-substrate distance during pulsed laser deposition on properties of LiNbO3 thin films Z Vakulov, E Zamburg, DA Golosov, SM Zavadskiy, AP Dostanko, ... Journal of Physics: Conference Series 917 (3), 032024, 2017 | 15 | 2017 |
| Technology for fabrication of sub-20 nm silicon planar nanowires array AV Miakonkikh, AA Tatarintsev, AE Rogozhin, KV Rudenko International Conference on Micro-and Nano-Electronics 2016 10224, 470-474, 2016 | 14 | 2016 |
| Dependence of the resistance of the negative e-beam resist hsq versus the dose in the RIE and wet etching processes AV Miakonkikh, NA Orlikovskiy, AE Rogozhin, AA Tatarintsev, ... Russian Microelectronics 47, 157-164, 2018 | 12 | 2018 |
| Planar betavoltaic converter creation with plasma-immersion ion implantation process KV Rudenko, AV Miakonkih, AE Rogojin, SV Bogdanov, VG Sidorov, ... IOP Conference Series: Materials Science and Engineering 122 (1), 012029, 2016 | 12 | 2016 |
| Robust semiconductor-on-ferroelectric structures with hafnia–zirconia–alumina UTBOX stacks compatible with CMOS technology VP Popov, VA Antonov, FV Tikhonenko, SM Tarkov, AK Gutakovskii, ... Journal of Physics D: Applied Physics 54 (22), 225101, 2021 | 11 | 2021 |
| Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation Z Vakulov, E Zamburg, D Khakhulin, A Geldash, DA Golosov, ... Nanomaterials 10 (7), 1371, 2020 | 11 | 2020 |
| Hafnia and alumina stacks as UTBOXs in silicon-on insulator VP Popov, VA Antonov, AK Gutakovskiy, IE Tyschenko, VI Vdovin, ... Solid-State Electronics 168, 107734, 2020 | 11 | 2020 |
Askar RezvanovPhD, Moscow Institute of Physics and TechnologyПодтвержден адрес электронной почты в домене phystech.edu
