| Porous silicon-based humidity sensor with interdigital electrodes and internal heaters P Fürjes, A Kovacs, C Dücso, M Adam, B Müller, U Mescheder Sensors and Actuators B: Chemical 95 (1-3), 140-144, 2003 | 128 | 2003 |
| Mikrosystemtechnik U Mescheder Auflage, Teubner, 6, 2004 | 117 | 2004 |
| Local laser bonding for low temperature budget UM Mescheder, M Alavi, K Hiltmann, C Lietzau, C Nachtigall, ... Sensors and Actuators A: Physical 97, 422-427, 2002 | 90 | 2002 |
| Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems U Mescheder, B Müller, S Baborie, P Urbanovic Journal of Micromechanics and Microengineering 19 (9), 094003, 2009 | 59 | 2009 |
| Ultrastable assembly and integration technology for ground-and space-based optical systems S Ressel, M Gohlke, D Rauen, T Schuldt, W Kronast, U Mescheder, ... Applied Optics 49 (22), 4296-4303, 2010 | 48 | 2010 |
| Micromechanical inclinometer U Mescheder, S Majer Sensors and Actuators A: Physical 60 (1-3), 134-138, 1997 | 46 | 1997 |
| Micromachined hotplate platform for the investigation of ink-jet printed, functionalized metal oxide nanoparticles P Walden, J Kneer, S Knobelspies, W Kronast, U Mescheder, S Palzer Journal of Microelectromechanical Systems 24 (5), 1384-1390, 2015 | 43 | 2015 |
| Simulation and realization of a novel micromechanical bi-stable switch M Freudenreich, U Mescheder, G Somogyi Sensors and Actuators A: Physical 114 (2-3), 451-459, 2004 | 41 | 2004 |
| Bed-embedded heart and respiration rates detection by longitudinal ballistocardiography and pattern recognition A Albukhari, F Lima, U Mescheder Sensors 19 (6), 1451, 2019 | 37 | 2019 |
| Mechanical investigation of perforated and porous membranes for micro-and nanofilter applications A Kovacs, Á Kovács, M Pogány, U Mescheder Sensors and Actuators B: Chemical 127 (1), 120-125, 2007 | 32 | 2007 |
| 3D free forms in c-Si via grayscale lithography and RIE I Khazi, U Muthiah, U Mescheder Microelectronic Engineering 193, 34-40, 2018 | 29 | 2018 |
| Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications A Kovacs, U Mescheder Sensors and Actuators B: Chemical 175, 179-185, 2012 | 27 | 2012 |
| Distortion optimized focusing mirror device with large aperture UM Mescheder, C Estañ, G Somogyi, M Freudenreich Sensors and Actuators A: Physical 130, 20-27, 2006 | 21 | 2006 |
| Optoelectrical detection system using porous silicon-based optical multilayers A Kovacs, P Jonnalagadda, U Mescheder IEEE Sensors Journal 11 (10), 2413-2420, 2011 | 19 | 2011 |
| Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy U Mescheder, A Nimo, B Müller, ASA Elkeir Microsystem technologies 18, 931-943, 2012 | 18 | 2012 |
| Charging of SiO2 electret film by ion implantation for MEMS based energy harvesting systems U Mescheder, P Urbanovic, B Müller, S Baborie Proceedings of PowerMEMS 2008+ microEMS2008, Sendai, Japan, November 9-12 …, 2008 | 18 | 2008 |
| Micromechanical properties of anomalously electrodeposited nanocrystalline Nickel-Cobalt alloys: A review I Khazi, U Mescheder Materials Research Express 6 (8), 082001, 2019 | 16 | 2019 |
| Investigation of humidity adsorption in porous silicon layers A Kovacs, D Meister, U Mescheder physica status solidi (a) 206 (6), 1343-1347, 2009 | 16 | 2009 |
| Odor-sensing system to support social participation of people suffering from incontinence A Ortiz Pérez, V Kallfaß-de Frenes, A Filbert, J Kneer, B Bierer, P Held, ... Sensors 17 (1), 58, 2016 | 15 | 2016 |
| Silicon X-ray masks: Pattern placement and overlay accuracy H Betz, HL Huber, S Pongratz, W Rohrmoser, W Windbracke, ... Microelectronic Engineering 5 (1-4), 41-49, 1986 | 15 | 1986 |
