High quality 3D shapes by silicon anodization A Ivanov, A Kovacs, U Mescheder physica status solidi (a) 208 (6), 1383-1388, 2011 | 14 | 2011 |
Tunable optical filters with wide wavelength range based on porous multilayers U Mescheder, I Khazi, A Kovacs, A Ivanov Nanoscale research letters 9, 1-6, 2014 | 13 | 2014 |
Simulation of Electrochemical Etching of Silicon with COMSOL A Ivanov Proceedings, COMSOL Conference, 2011 | 11 | 2011 |
Dynamic Simulation of Electrochemical Etching of Silicon A Ivanov, U Mescheder Proceedings of the COMSOL Conference, 2012 | 9 | 2012 |
Investigation of plastic electrode tools for electrochemical machining of silicon VV Lyubimov, VM Volgin, U Mescheder, IV Gnidina, AS Ivanov Precision Engineering 47, 546-556, 2017 | 8 | 2017 |
Silicon electrochemical etching for 3D microforms with high quality surfaces A Ivanov, U Mescheder Advanced Materials Research 325, 666-671, 2011 | 8 | 2011 |
Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments A Ivanov Springer, 2017 | 7 | 2017 |
Primary current distribution model for electrochemical etching of silicon through a circular opening A Ivanov, U Mescheder COMSOL Conference, Grenoble, France, 14th–16th Oct, 2015 | 6 | 2015 |
Optical sensing and analysis system based on porous layers A Kovacs, A Malisauskaite, A Ivanov, U Mescheder, R Wittig The 17th International Conference on Miniaturized Systems for Chemistry and …, 2013 | 6 | 2013 |
Finite-elements simulation of etch front propagation in silicon electropolishing process A Ivanov, U Mescheder, P Woias ECS Transactions 58 (46), 15, 2014 | 3 | 2014 |
Optimisation of surface quality of 3D silicon master forms for injection molding of optical micro elements A Ivanov, A Kovacs, U Mescheder, S Kuhn, M Kübler, A Burr Proc. MST Kongress, 2009 | 3 | 2009 |
Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching A Ivanov, U Mescheder, M Kroner, P Woias Tagungsband 19th MicroMechanics Europe Workshop, 28-30, 2008 | 3 | 2008 |
Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments A Ivanov, A Kovacs, U Mescheder Procedia Engineering 168, 1180-1183, 2016 | 2 | 2016 |
Surface micromachining (sacrificial layer) and its applications in electronic devices A Ivanov, U Mescheder Porous Silicon: From Formation to Applications: Optoelectronics …, 2016 | 2 | 2016 |
Finite-elements simulation for true 3D structure generation of anisotropic electrochemical wet-etching processes M Kroener, A Ivanov, F Goldschmidtböing, U Mescheder, P Woias ECS Transactions 19 (26), 93, 2009 | 2 | 2009 |
Einfluss unterschiedlicher Passivierungsschichten auf die Bildungsrate von porösem Silizium an Strukturkanten bei der 3DFormherstellung A Ivanov, U Mescheder, A Kovacs, R Huster Proceedings Mikrosystemtechnik-Kongress 2007: 15.–17. Oktober 2007, Dresden …, 2007 | 2 | 2007 |
Silicon Anodization as a Structuring Technique A Ivanov Springer, 2018 | 1 | 2018 |
Schmalbandige photonische Kristalle für Multispektral-Analyse A Kovacs, A Ivanov, U Mescheder MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23.–25 …, 2017 | 1 | 2017 |
Refractometer using photonic crystals for fermentation process characterization A Kovacs, A Ivanov, U Mescheder 2015 IEEE SENSORS, 1-4, 2015 | 1 | 2015 |
Tunable narrow band porous photonic crystals for MOEMS based scanning systems A Kovacs, A Ivanov, U Mescheder Procedia Engineering 120, 811-815, 2015 | 1 | 2015 |