Interface and material characterization of thin Al2O3 layers deposited by ALD using TMA/H2O LG Gosset, JF Damlencourt, O Renault, D Rouchon, P Holliger, ...
Journal of non-crystalline solids 303 (1), 17-23, 2002
164 2002 Growth of SiO2 on SiC by dry thermal oxidation: mechanisms I Vickridge, J Ganem, Y Hoshino, I Trimaille
Journal of Physics D: Applied Physics 40 (20), 6254, 2007
98 2007 Use of 18O isotopic labelling to study thermal dry oxidation of silicon as a function of temperature and pressure I Trimaille, S Rigo
Applied Surface Science 39 (1-4), 65-80, 1989
83 1989 Limiting step involved in the thermal growth of silicon oxide films on silicon carbide IC Vickridge, I Trimaille, JJ Ganem, S Rigo, C Radtke, IJR Baumvol, ...
Physical review letters 89 (25), 256102, 2002
52 2002 Mechanisms of thermal nitridation of silicon IJR Baumvol, FC Stedile, JJ Ganem, S Rigo, I Trimaille
Journal of the Electrochemical Society 142 (4), 1205-1214, 1995
52 1995 Incorporation of oxygen and nitrogen in ultrathin films of annealed in NO IJR Baumvol, JJ Ganem, LG Gosset, I Trimaille, S Rigo
Applied physics letters 72 (23), 2999-3001, 1998
40 1998 Diffusion of near surface defects during the thermal oxidation of silicon JJ Ganem, I Trimaille, P André, S Rigo, FC Stedile, IJR Baumvol
Journal of applied physics 81 (12), 8109-8111, 1997
40 1997 Dry oxidation mechanisms of thin dielectric films formed under N2 O using isotopic tracing methods JJ Ganem, S Rigo, I Trimaille, IJR Baumvol, FC Stedile
Applied physics letters 68 (17), 2366-2368, 1996
40 1996 Thermal nitridation of SiO2 films in ammonia: The role of hydrogen IJR Baumvol, FC Stedile, JJ Ganem, I Trimaille, S Rigo
Journal of The Electrochemical Society 143 (4), 1426-1434, 1996
33 1996 A study of the initial stages of the oxidation of silicon using 18O2 and RTP JJ Ganem, G Battistig, S Rigo, I Trimaille
Applied surface science 65, 647-653, 1993
32 1993 Study of thin hafnium oxides deposited by atomic layer deposition JJ Ganem, I Trimaille, IC Vickridge, D Blin, F Martin
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2004
27 2004 Oxygen isotopic exchange occurring during dry thermal oxidation of 6H SiC IC Vickridge, D Tromson, I Trimaille, JJ Ganem, E Szilagyi, G Battistig
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2002
26 2002 Thermal Nitridation of SiO2 Films in Ammonia Isotopic Tracing of Nitrogen and Oxygen in the Initial Stages IJR Baumvol, FC Stedile, JJ Ganem, I Trimaille, S Rigo
Journal of The Electrochemical Society 143 (9), 2938-2945, 1996
26 1996 Formation of modified interfaces with intrinsic low defect concentrations LG Gosset, JJ Ganem, HJ Von Bardeleben, S Rigo, I Trimaille, JL Cantin, ...
Journal of applied physics 85 (7), 3661-3665, 1999
25 1999 Nitrogen transport during rapid thermal growth of silicon oxynitride films in N2 O IJR Baumvol, FC Stedile, JJ Ganem, I Trimaille, S Rigo
Applied physics letters 69 (16), 2385-2387, 1996
25 1996 Effects of sputter deposition parameters and post-deposition annealing on the electrical characteristics of LaAlO3 dielectric films on Si V Edon, MC Hugon, B Agius, L Miotti, C Radtke, F Tatsch, JJ Ganem, ...
Applied Physics A 83 (2), 289-293, 2006
24 2006 Isotopic tracing during rapid thermal growth of silicon oxynitride films on Si in and IJR Baumvol, FC Stedile, JJ Ganem, I Trimaille, S Rigo
Applied physics letters 70 (15), 2007-2009, 1997
23 1997 Time dependence of the oxygen exchange at the interface during dry thermal oxidation of silicon T Åkermark, LG Gosset, JJ Ganem, I Trimaille, I Vickridge, S Rigo
Journal of applied physics 86 (2), 1153-1155, 1999
20 1999 IBA study of the growth mechanisms of very thin silicon oxide films: the effect of wafer cleaning FC Stedile, IJR Baumvol, JJ Ganem, S Rigo, I Trimaille, G Battistig, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1994
19 1994 Thermal oxidation of 6H-SiC studied by oxygen isotopic tracing and narrow nuclear resonance profiling I Trimaille, JJ Ganem, IC Vickridge, S Rigo, G Battistig, E Szilagyi, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2004
18 2004