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Anton Kobelev
Anton Kobelev
Peter the Great St. Petersburg Polytechnic University (SPbPU)
Verified email at spbstu.ru - Homepage
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Cited by
Cited by
Year
RF discharge for in situ mirror surface recovery in ITER
AG Razdobarin, AM Dmitriev, AN Bazhenov, IM Bukreev, MM Kochergin, ...
Nuclear Fusion 55 (9), 093022, 2015
392015
In situ plasma cleaning of ITER diagnostic mirrors in noble-gas RF discharge
AM Dmitriev, NA Babinov, AN Bazhenov, IM Bukreev, MM Kochergin, ...
Physica Scripta 2017 (T170), 014072, 2017
262017
Tokamak research at the Ioffe Institute
NN Bakharev, GI Abdullina, VI Afanasyev, AB Altukhov, LG Askinazi, ...
Nuclear Fusion 59 (11), 112022, 2019
252019
Boron trichloride plasma treatment effect on ohmic contact resistance formed on GaN-based epitaxial structure
AA Kobelev, YV Barsukov, NA Andrianov, AS Smirnov
Journal of Physics: Conference Series 586 (1), 012013, 2015
152015
Encyclopedia of Plasma Technology-Two Volume Set
JL Shohet
CRC press, 2016
142016
Enhanced silicon nitride etching in the presence of F atoms: Quantum chemistry simulation
YV Barsukov, V Volynets, AA Kobelev, NA Andrianov, AV Tulub, ...
Journal of Vacuum Science & Technology A 36 (6), 2018
132018
Influence of surface processing in a BCl3 plasma on the formation of ohmic contacts to AlGaN/GaN structures
NA Andrianov, AA Kobelev, AS Smirnov, YV Barsukov, YM Zhukov
Technical Physics 62, 436-440, 2017
72017
Boron trichloride dry etching
A Kobelev, N Andrianov, A Smirnov, Y Barsukov
Encyclopedia of Plasma Technology-Two Volume Set, 193-202, 2016
72016
Modeling of an AC Plasma Torch—Part I: Electrical Parameters and Flow Temperature
NY Bykov, NV Obraztsov, AA Kobelev, AV Surov
IEEE Transactions on Plasma Science 49 (3), 1017-1022, 2020
62020
Note: Laser-cut molybdenum grids for a retarding field energy analyzer
K Landheer, AA Kobelev, AS Smirnov, J Bosman, S Deelen, M Rossewij, ...
Review of Scientific Instruments 88 (6), 2017
62017
Modeling of an AC Plasma Torch—Part II: Gasdynamic Pattern and Effect of Flow Rate
NY Bykov, NV Obraztsov, AA Kobelev, AV Surov
IEEE transactions on plasma science 49 (3), 1023-1027, 2021
52021
Collisional RF sheath in capacitive discharge in strong oblique magnetic field
A Kobelev, N Babinov, Y Barsukov, T Chernoizumskaya, A Dmitriev, ...
Physics of Plasmas 26 (1), 2019
52019
Etching of Si3N4 by SF6/H2 and SF6/D2 plasmas
PA Pankratiev, YV Barsukov, AA Kobelev, AY Vinogradov, IV Miroshnikov, ...
Journal of Physics: Conference Series 1697 (1), 012222, 2020
42020
Влияние обработки поверхности в BCl3 плазме на формирование омических контактов к структурам AlGaN/GaN
НА Андрианов, АА Кобелев, АС Смирнов, ЮВ Барсуков, ЮМ Жуков
Журнал технической физики 87 (3), 413-418, 2017
42017
Многосеточные энергоанализаторы задерживающего потенциала для измерения функции распределения ионов по энергиям из плазмы высокочастотного емкостного разряда
A Nikolai
Uspekhi Prikladnoi Fiziki 5 (6), 608-617, 2017
22017
Selective SiN/SiO2 etching by SF6/H2/Ar/He plasma
P Pankratiev, Y Barsukov, A Vinogradov, V Volynets, A Kobelev, ...
AIP Conference Proceedings 2179 (1), 2019
12019
Edge tokamak transport in regimes with high collisionality
V Rozhansky, I Baranovsky, A Kobelev
Contributions to Plasma Physics 62 (5-6), e202100167, 2022
2022
Modeling the Air Mixture Flow in an AC Plasma Torch
N Bykov, A Kobelev, N Obraztsov, A Surov, A Borovskoy
International Summer School-Conference “Advanced Problems in Mechanics”, 278-287, 2020
2020
Анализ потоков ионов из ВЧ газового разряда, используемого для процессов модификации поверхности твердого тела: специальность 01.04. 04" Физическая электроника"
АА Кобелев
2019
Численное моделирование режимов обработки поверхности GaN в BCl3-плазме высокочастотного индукционного разряда
A Nikolai
Uspekhi Prikladnoi Fiziki 6 (5), 381-388, 2018
2018
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